EDWARDS IXL120 INSTRUCTION MANUAL Pdf Download | ManualsLib
View and Download Edwards IXL120 instruction manual online. Dry Pump System. iXL120 water pump pdf manual download.
iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low
Ideal Vacuum | Edwards iXL120N Dry Vacuum Pump, 200 …
Edwards iXL120N Features and Benefits: Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance; Unique dual inlet arrangement allows efficient foreline routing and location options; Green Mode can reduce power consumption by up to 92% during idle periods
EDWARDS IXL120N INSTRUCTION MANUAL Pdf Download | ManualsLib
View and Download Edwards IXL120N instruction manual online. Dry Pump System. iXL120N water pump pdf manual download. Also for: Ixl120.
iXL120 Dry Pump - EDWARDS - PDF Catalogs - DirectIndustry
It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space.
Edwards iXL120 Dry Pump System Instruction Manual | Manualzz
The iXL120 is a low energy, compact dry pump system that is designed to give extremely low cost of ownership. It is intended only for use on clean duty applications, such as semiconductor manufacturing, where the pumped gas is free from particulates, corrosive gases, and moisture.
Edwards Dry Vacuum Pump iXL120 E 200-460VAC 1/4 QC Water …
Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs; Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance; Unique dual inlet arrangement allows efficient foreline routing and location options
Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards. The iXL120 is a low energy, compact dry pump system that can be mounted on tool or remotely. It is designed to give extremely low cost of ownership. The iXL120 is intended only for use on clean duty applications as defined in Figure 1.
EDWARDS IXL120 INSTRUCTION MANUAL Pdf Download
View and Download Edwards IXL120 instruction manual online. Dry Pump System. iXL120 water pump pdf manual download.
iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applicaions. It provides fast pump down of load lock chambers with extremely low