[labnetwork] N2 pump purge source of chamber contamination?
Depending on the size of your dry pump it likely uses 35-50 slpm of N2 purge and the turbo bearing purge would be much less than the mech pumps N2 purge gas consumption. An RGA would be a terrific tool to review effects.
[labnetwork] Update on CDA in lieu of N2 purging of drypumps
2013年10月2日 · Our average dry pumps consume ~35 slpm of N2 for purging (note: some vendor-designed purge circuits are process-driven meaning N2 is used at high flow rates only during process). Our first effort was to review CDA vs. N2 with our pump manufacturers and with our pump rebuilders.
Dry Pump (干式真空泵）的原理和优点-海门市鑫华真空设备厂
Dry pump用在chamber由大气压下直接抽真空，可以维持进出口压差105倍。 Dry pump有电源（电源使马达带动螺杆式转子转动)。 N2 purge(稀释防止particle沉积在间隙内），而 且N2形成气帘防止rotor润滑油进入，产生污染。
在機械式pump中使用的N2 purge/ N2 ballast的設計目的
在機械式 pump 中, 所使用的 N2 purge/ N2 ballast 的設計目的為降低壓縮氣體的分壓, 以減少氣體附著沉積在 pump 管線. 此分類上一篇: 何謂 Self Bias: Vdc? 否 是 (若未登入"個人新聞台帳號"則看不到回覆唷!)
Purge pump? - Fusor Forums
2009年6月19日 · The purge input to backing pumps and the backing side of turbos is extensively used in the semiconductor industry to sweep away chemicals and water vapour. Ie Silane is used to put down Si and Sio2 layers and is explosive when mixed with air so watering it down with N2 or other inert gases keeps the process safe and the excess purge gas cleans ...
What is Nitrogen Purging? Applications, Procedures, and Benefits of N2 …
Transformers and other volatile electrical environments enhance safety by using the N 2 purging procedure. Nitrogen purging in the brewery industry extends the shelf life of beer. Ships and tankers use nitrogen blanketing to remove potentially combustible environments.
標竿案例 | 節能標竿網 - Energypark
關閉SPT S Chamber 與 LL 之N2流量減少背壓,使pump電流可達到最小值. 設計理念或改善流程. L5B SPT有9台, LL CH有5顆DRY PUMP(未裝真空節能產生器) ,S CH 有1顆DRY PUMP (有裝真空節能產生器),N2 為purge PUMP 真空室,SPT 非特氣製程,關掉N2流量減少背壓 節能效益計算式: 1.LL CH 單顆PUMP ...
標竿案例 | 節能標竿網 - Energypark
1.真空 Dry Pump 加裝真空節能產生器係為運用白努力原理, 在Pump 後端加一管路通入N2或CDA 用以加快氣體流速→降低管內壓力→真空牽引→降低Pump轉子作工能耗
[labnetwork] Update on CDA in lieu of N2 purging of drypumps
Our average dry pumps consume ~35 slpm of N2 for > purging (note: some vendor-designed purge circuits are process-driven > meaning N2 is used at high flow rates only during process). > > Our first effort was to review CDA vs. N2 with our …
[labnetwork] Using CDA, rather than N2, as pump purge in Bosch …
2013年4月12日 · Hi John, I have in the past used CDA fed through a cascade of nitrogen membrane filters to achieve 99.9% N2 purity which was then used to purge dry pumps used in a variety of applications. The setup worked well without any issues for a number of years.